MEMS

The research in microelectronics has provided the means to manufacture microscopic features in the micrometer and nanometer range. MEMS (micro-electromechanical systems) are taking this technology to the next step, by the fabrication of microscopic mechanical, i.e. moving, structures. MEMS pressure sensors, accelerometers, inkjet printer heads, and micro-mirror projection systems have been on the market for some time, and optical fiber switch matrices have recently been commercialized. With many other applications, like bio-applications (lab-on-chip) and RF-MEMS (Radio Frequency-), in laboratories all over the world, the future of MEMS looks bright.

There are many advantages to MEMS that are directly related to their fabrication method and size, like parallel (batch) manufacturing, which leads to a large number of identical, low-cost devices. MEMS offer high accuracy, low power consumption, low weight and they can analyse small quantities of liquid. Their integration with microelectronics is leading to “smart” microsystems. Large potential benefits for society are foreseen in the near future in the telecom, bio- and medical fields, and in chemical/environmental sensors development.

Traditionally, MEMS have been investigated with equipment that was already available in the microelectronics labs, like low- to medium voltage elctronic measurement systems (e.g. semiconductor parameter, impedance and RF network analysers), as well as optical and electron micropscopy techniques. Recently, interferometric optical techniques and laser Doppler vibrometers dedicated to MEMS have had a large impact, but the amount of dedicated electronic measurement equipment is still limited. This is the field that Falco Systems wants to cover with its products.

MEMS links:
MEMSNet
Wikipedia MEMS
MEMS exchange
Sandia MEMS
MEMS introduction
Analog Devices commercial MEMS
MEMSCAP multi-user MEMS process